Performance evaluation of MEMS devices for various geometrical structures

dc.contributor.guide	Bhoir, Deepak V
dc.coverage.spatial
dc.creator.researcher	Kasambe, Prashant Vasantrao
dc.date.accessioned	2023-03-20T11:32:40Z
dc.date.available	2023-03-20T11:32:40Z
dc.date.awarded	2022
dc.date.completed	2021
dc.date.registered	2017
dc.description.abstract	File attached newline
dc.description.note	Location - Knowledge Resource Centre, Kalina
dc.format.accompanyingmaterial	CD
dc.format.dimensions	21*30
dc.format.extent	xx, 178p
dc.identifier.uri	http://hdl.handle.net/10603/471138
dc.language	English
dc.publisher.institution	Electrical Engineering, Fr_C_Rodrigues Institute of Technology,Navi Mumbai
dc.publisher.place	Mumbai
dc.publisher.university	University of Mumbai
dc.relation
dc.rights	university
dc.source.university	University
dc.subject.keyword	Engineering
dc.subject.keyword	Engineering and Technology
dc.subject.keyword	Engineering Electrical and Electronic
dc.subject.keyword	Micro Electromechanical Systems
dc.title	Performance evaluation of MEMS devices for various geometrical structures
dc.title.alternative
dc.type.degree	Ph.D.