Investigation of effect of deposition parameters on composition structure and properties of plasma deposited boron carbide thin films

dc.contributor.guide	Suchitra Sinha
dc.coverage.spatial
dc.creator.researcher	Arundhati Bute
dc.date.accessioned	2021-09-15T09:03:17Z
dc.date.available	2021-09-15T09:03:17Z
dc.date.awarded
dc.date.completed	2021
dc.date.registered	2015
dc.description.abstract	newline
dc.description.note
dc.format.accompanyingmaterial	DVD
dc.format.dimensions
dc.format.extent
dc.identifier.uri	http://hdl.handle.net/10603/340566
dc.language	English
dc.publisher.institution	Department of Physical Sciences
dc.publisher.place	Mumbai
dc.publisher.university	Homi Bhabha National Institute
dc.relation
dc.rights	university
dc.source.university	University
dc.subject.keyword	Neutron absorption
dc.subject.keyword	Optical Properties
dc.subject.keyword	PECVD
dc.subject.keyword	Self-bias
dc.subject.keyword	Thin Films
dc.subject.keyword	Tribological Properties
dc.title	Investigation of effect of deposition parameters on composition structure and properties of plasma deposited boron carbide thin films
dc.title.alternative
dc.type.degree	Ph.D.