Investigation on microturning of electrode materials in integrated multiprocess micromachine tool

Abstract

The marked increase in demand for miniaturized consumer newlineproducts in a broad range of potential applications calls for development of newlineultra precision manufacturing processes to fabricate microscale features in newlineengineering products Microcomponent fabrication requires reliable and newlinerepeatable methods with accurate analysis tools Many common methods of newlinemanufacturing miniature components have been based on semiconductor newlineprocessing techniques usually in large batch production These processes are newlinequasi 3D manufacturing processes having limitations such as less aspect ratio newlineand limited workpiece materials Therefore miniaturization of conventional newlinemanufacturing processes like turning milling drilling etc finds a great newlineapplication in this field since they can produce components in 3D domain newlinewith a variety of workpiece materials newline newline