Design and Fabrication of Micro Structure Based Electro Mechanical Systems for Sound Generation

dc.contributor.guide	Parveen Kumar Lehana
dc.coverage.spatial
dc.creator.researcher	Sandeep Arya
dc.date.accessioned	2017-07-11T12:17:05Z
dc.date.available	2017-07-11T12:17:05Z
dc.date.awarded
dc.date.completed	13-10-2016
dc.date.registered	01-05-2013
dc.description.abstract	Design and Fabrication of Micro-Structure Based Electro-Mechanical Systems for Sound Generation newline
dc.description.note
dc.format.accompanyingmaterial	CD
dc.format.dimensions
dc.format.extent	Total Pages - 161
dc.identifier.uri	http://hdl.handle.net/10603/159931
dc.language	English
dc.publisher.institution	Department of Physics and Electronics
dc.publisher.place	Jammu and Kashmir
dc.publisher.university	University of Jammu
dc.relation
dc.rights	university
dc.source.university	University
dc.subject.keyword	Micro-cantilever, MEMS, sound generation, lithography, piezoelectric
dc.title	Design and Fabrication of Micro Structure Based Electro Mechanical Systems for Sound Generation
dc.title.alternative	Design and Fabrication of Micro-Structure Based Electro-Mechanical Systems for Sound Generation
dc.type.degree	Ph.D.