Development of a high performance silicon and nanocrystalline porous silicon based MEMS pressure sensor

dc.contributor.guide	Saha, H.
dc.coverage.spatial
dc.creator.researcher	Pramanik, Chirasree
dc.date.accessioned	2017-11-21T09:41:49Z
dc.date.available	2017-11-21T09:41:49Z
dc.date.awarded	2007
dc.date.completed	2006
dc.date.registered	n.d.
dc.description.abstract	None newline
dc.description.note	Appendix p. 217-231
dc.format.accompanyingmaterial	None
dc.format.dimensions
dc.format.extent	231 p.
dc.identifier.uri	http://hdl.handle.net/10603/182205
dc.language	English
dc.publisher.institution	Department of Electronics and Tele-Communication Engineering
dc.publisher.place	Kolkata
dc.publisher.university	Jadavpur University
dc.relation
dc.rights	university
dc.source.university	University
dc.subject.keyword	MEMS
dc.subject.keyword	Micro electro mechanical systems (MEMS)
dc.subject.keyword	Nanostructure materials
dc.subject.keyword	Porous silicon
dc.subject.keyword	Sensor technology
dc.subject.keyword	Silicon -- Electric properties
dc.title	Development of a high performance silicon and nanocrystalline porous silicon based MEMS pressure sensor
dc.title.alternative
dc.type.degree	Ph.D.