Deposition and characterization of thin film coatings by microwave electron cyclotron resonance ECR plasmas

dc.contributor.guide	Patil, D S
dc.coverage.spatial
dc.creator.researcher	Singh, Sujit Bansraj
dc.date.accessioned	2023-09-08T06:45:28Z
dc.date.available	2023-09-08T06:45:28Z
dc.date.awarded
dc.date.completed	2008
dc.date.registered
dc.description.abstract	newline Yes newline
dc.description.note
dc.format.accompanyingmaterial	DVD
dc.format.dimensions
dc.format.extent	iv, 132p
dc.identifier.uri	http://hdl.handle.net/10603/511163
dc.language	English
dc.publisher.institution	Physics, Bhabha Atomic Research Centre
dc.publisher.place	Mumbai
dc.publisher.university	University of Mumbai
dc.relation
dc.rights	university
dc.source.university	University
dc.subject.keyword	Characterization Techniques
dc.subject.keyword	Magnetron Sputtering
dc.subject.keyword	Microwave Electron Cyclotron
dc.subject.keyword	Physical Sciences
dc.subject.keyword	Physics
dc.subject.keyword	Physics Atomic Molecular and Chemical
dc.subject.keyword	Resonance Plasmas
dc.title	Deposition and characterization of thin film coatings by microwave electron cyclotron resonance ECR plasmas
dc.title.alternative
dc.type.degree	Ph.D.