A Study On Polymer Based Micro Mass Optical Mems Sensor

dc.contributor.guide	Rajasekhara Babu .M and Zachariah C Alex
dc.coverage.spatial
dc.creator.researcher	Mala Serene .I
dc.date.accessioned	2018-06-01T10:27:02Z
dc.date.available	2018-06-01T10:27:02Z
dc.date.awarded	23/06/2017
dc.date.completed	2017
dc.date.registered	01/07/2006
dc.description.abstract	newline
dc.description.note
dc.format.accompanyingmaterial	DVD
dc.format.dimensions
dc.format.extent
dc.identifier.uri	http://hdl.handle.net/10603/205096
dc.language	English
dc.publisher.institution	School of Computing Science and Engineering
dc.publisher.place	Vellore
dc.publisher.university	VIT University
dc.relation
dc.rights	university
dc.source.university	University
dc.subject.keyword	MEMS Applications
dc.subject.keyword	Micro Electro Mechanical Systems (MEMS)
dc.subject.keyword	Optical MEMS Applications
dc.title	A Study On Polymer Based Micro Mass Optical Mems Sensor
dc.title.alternative
dc.type.degree	Ph.D.