Statistical aspects of fracture and failure of polysilicon MEMS experiments and simulations

Files

01_title.pdf (58.42 KB)

03_certificate.pdf (68.59 KB)

04_acknowledgement.pdf (46.86 KB)

05_content.pdf (52.67 KB)

06_list of figures and tables.pdf (141.34 KB)

Abstract

newlineAVALABLE

URI

http://hdl.handle.net/10603/399996

Collections

Applied Mechanics