Design and Characterisation of Surface Acoustic Wave Sensors at High Temperatures

Abstract

Surface acoustic wave (SAW) devices are extensively used in the design of filters, sensors, newlineand actuators. SAW is an elastic wave propagating over the surface of a piezoelectric newlinesubstrate. The wave is generated by applying an electrical signal to an inter-digital transducer newline(IDT). The IDT is a comb-like structure formed with metallic electrodes. To make a SAW newlinesensor, these IDTs are placed on the top surface of the piezoelectric substrate, where the IDT newlinegenerates the Rayleigh SAW newline