Fabrication and characterization of SiO2 microcantilevers for Relative Humidity sensing

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dc.contributor.guideK Prabakar
dc.coverage.spatial
dc.creator.researcherBALASUBRAMANIAN S
dc.date.accessioned2021-01-12T11:15:34Z
dc.date.available2021-01-12T11:15:34Z
dc.date.awarded
dc.date.completed2020
dc.date.registered2015
dc.description.abstractnewline
dc.description.note
dc.format.accompanyingmaterialDVD
dc.format.dimensions
dc.format.extent
dc.identifier.urihttp://hdl.handle.net/10603/311667
dc.languageEnglish
dc.publisher.institutionDepartment of Physical Sciences
dc.publisher.placeMumbai
dc.publisher.universityHomi Bhabha National Institute
dc.relation
dc.rightsuniversity
dc.source.universityUniversity
dc.subject.keywordPhysical Sciences
dc.titleFabrication and characterization of SiO2 microcantilevers for Relative Humidity sensing
dc.title.alternative
dc.type.degreePh.D.

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