Design Fabrication and Characterization of Mems Based Capacitive Pressure Sensors for Low Pressure Bio Medical Applications

Abstract

newline Biomedical monitoring and diagnostic tools are indispensable for the efficacious management and treatment of a wide range of health conditions. Nevertheless, traditional pressure sensors utilized in medical equipment frequently encounter significant obstacles concerning sensitivity, size, and integration capabilities. These constraints impede the provision of high-resolution measurements required for accurate monitoring in dynamic and sensitive biomedical settings. Voluminous or cumbersome sensor components can constrain the practicality of medical devices, rendering them less amenable to continuous, real-time monitoring in wearable or implantable configurations. Consequently, there is an exigent requirement for sophisticated pressure sensors that exhibit heightened sensitivity and integration within biomedical applications. newline