Low voltage actuation of electrostatic microelectromechanical systems actuators using ferroelectric negative capacitance

dc.contributor.guide	Ajoy, Arvind
dc.coverage.spatial
dc.creator.researcher	Raman, Raghuram Tattamangalam
dc.date.accessioned	2023-10-12T11:59:34Z
dc.date.available	2023-10-12T11:59:34Z
dc.date.awarded	2022
dc.date.completed	2022
dc.date.registered	2017
dc.description.abstract	Available newline
dc.description.note
dc.format.accompanyingmaterial	None
dc.format.dimensions
dc.format.extent	xxix, 129p.
dc.identifier.uri	http://hdl.handle.net/10603/517843
dc.language	English
dc.publisher.institution	Department of Electrical Engineering
dc.publisher.place	Palakkad
dc.publisher.university	Indian Institute of Technology Palakkad
dc.relation	120
dc.rights	university
dc.source.university	University
dc.subject.keyword	Electrostatic MEMS actuators
dc.subject.keyword	Engineering
dc.subject.keyword	Engineering and Technology
dc.subject.keyword	Engineering Electrical and Electronic
dc.subject.keyword	SPICE modeling
dc.title	Low voltage actuation of electrostatic microelectromechanical systems actuators using ferroelectric negative capacitance
dc.title.alternative
dc.type.degree	Ph.D.