Studies on ZrN metallisation in metal semiconductor and metal oxide semiconductor structures

dc.contributor.guide	Reddy, V. Rajagopal	en_US
dc.coverage.spatial		en_US
dc.creator.researcher	Bhuvaneswari, H. B.	en_US
dc.date.accessioned	2015-03-13T04:39:29Z
dc.date.available	2015-03-13T04:39:29Z
dc.date.awarded		en_US
dc.date.completed	2005	en_US
dc.date.issued	2015-03-13
dc.date.registered		en_US
dc.description.abstract	newline	en_US
dc.description.note		en_US
dc.format.accompanyingmaterial	None	en_US
dc.format.dimensions		en_US
dc.format.extent		en_US
dc.identifier.uri	http://hdl.handle.net/10603/37102
dc.language	English	en_US
dc.publisher.institution	Department of Computer Science	en_US
dc.publisher.place	Mysore	en_US
dc.publisher.university	University of Mysore	en_US
dc.relation		en_US
dc.rights	university	en_US
dc.source.university	University	en_US
dc.subject.keyword	Glow discharges	en_US
dc.subject.keyword	Metallizing	en_US
dc.subject.keyword	Microelectronics	en_US
dc.subject.keyword	Microprobe analysis	en_US
dc.subject.keyword	Scanning electron microscopy	en_US
dc.subject.keyword	Semiconductor-metal boundaries	en_US
dc.subject.keyword	Thin-film circuits	en_US
dc.subject.keyword	Thin films	en_US
dc.subject.keyword	Zirconium oxide	en_US
dc.title	Studies on ZrN metallisation in metal semiconductor and metal oxide semiconductor structures	en_US
dc.title.alternative		en_US
dc.type.degree	Ph.D.	en_US