Fabrication and studies of a si h thin films and single side c si n a si h p heterojunction solar cells

Abstract

In this thesis one sided c Si a Si H heterojunction solar cells Ag Al c Si n a Si H i a Si H p ITO Ag with open circuit voltage Voc as high as 711 mV and efficiency 201 179 of 17 3 were fabricated on double side polished n type c Si wafer by RFPECVD technique in multi chamber system In order to improve the device performance the influence of hydrogen plasma treatment and hydrogen flow rate on the microstructural optical and electrical properties of intrinsic and doped a Si H films have